Springer
Atomic Layer Deposition for Semiconductors
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Description
Condition - Very Good
The item shows wear from consistent use but remains in good condition. It may arrive with damaged packaging or be repackaged.
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Technical Specifications
Manufacturer
Springer
Height
23.5 cm
Length
15.9 cm
Width
1.9 cm
Weight
0.52 kg
Release date
19 October 2013
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Your order is shipped from the USA and delivered to your door in South Africa in 10–20 working days. All items are fully tracked.
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