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Computers & Technology

Microprocessors & System Design

Atomic Layer Deposition for Semiconductors

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Condition - Very Good
The item shows wear from consistent use, but it remains in good condition and functions properly. Item may arrive with damaged packaging or be repackaged. It may be marked, have identifying markings on it, or have minor cosmetic damage. It may also be missing some parts/accessories or bundled items.

Atomic Layer Deposition for Semiconductors

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Country USA
Brand Springer
Manufacturer Springer
Binding Hardcover
ItemPartNumber 89 black & white illustrations, 81 colou
ReleaseDate 2013-10-19
UnitCount 1
EANs 9781461480532

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