Introduction to Semiconductor Manufacturing Technology (SPIE Press Monograph PM220)
| Country | USA |
| Brand | OUP USA |
| Manufacturer | Oxford University Press |
| Binding | Paperback |
| ItemPartNumber | black & white illustrations, black & whi |
| UnitCount | 1 |
| EANs | 9780199861224 |
| ReleaseDate | 2012-11-15 |