Ion Implantation: Basics to Device Fabrication (The Springer International Series in Engineering and Computer Science, 293)
| Country | USA |
| Manufacturer | Independently published |
| Binding | Paperback |
| ItemPartNumber | DS-B8009 |
| Model | DS-B8009 |
| EANs | 9798872320616 |
| ReleaseDate | 0000-00-00 |