Ion Implantation: Basics to Device Fabrication (The Springer International Series in Engineering and Computer Science, 293)
| Country | USA |
| Brand | Advantage Media Group |
| Manufacturer | Advantage Media Group |
| Binding | Hardcover |
| ItemPartNumber | illustrations |
| UnitCount | 1 |
| EANs | 9781599324289 |
| ReleaseDate | 2015-07-21 |